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Robert K. Waits - is a thin film technology consultant in Sunnyvale, California. Since 1962 he has been involved in such areas as integrated circuit production engineering, thin-film technology development, plasma etching and metallization and interconnect process development.

Mr. Waits has authored numerous papers and a book chapter and hold fours U.S. patents. He has been a member of the American Vacuum Society since 1958 and has taught AVS short courses in microcircuit thin-film technology, thin film processes and residual gas analysis applications. He received a B.A. in chemistry and physics from Texas Christian University and an M.S. degree in physical chemistry from Stanford University. Robert can be reached at: rwaits AT juno DOT com.


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Phone/Fax: 512.292.9189

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